Helyssen solutions

Helyssen has developed a new generation of helicon plasma source for which the limitations related to conventional designs fall. As a matter of fact, thanks to their high antenna-plasma coupling capabilities Helyssen cylindrical plasma sources can be operated with much larger diameters, typically up to 30-40 cm, and with operating pressures up to 20-30 Pa. Furthermore, Helyssen plasma sources were shown to be able to sustain helicon discharges with electronegative gases at high flow rates (typ 500 sccm).

Even more interesting could be the very new concept of large area Helyssen plasma source, which is currently under development. This new concept should allow high density and highly uniform plasmas to be generated over very large surfaces, which will constitute a major breakthrough in the world of plasma sources.

View of drum for SiOx coating on PET foil