Solutions

Helyssen models RF plasmas and PECVD

Helyssen’s key expertise in modelling and understanding complex plasma process includes: 

  • RF design :  matching circuit optimisation and antenna design
  • Reactor design and modelling
  • Plasma modelling for PECVD application

  • Helyssen can help you to model your complex plasma system to better understand the inner processes and to optimize them
  • Helyssen can developp COMSOL models for your specific applications

 

3D Model of Helyssen Planar antenna

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Plot of electron “temperature” (slice)