Plasma Processing lies at the heart of many industries
Major applications include:
- Integrated Circuit manufacturing
- Sources and display systems based on Thin-film transistors (TFTs)
- Solar cells production
- Food packaging application
- Plasma-based lighting systems
- Microelectromechanical systems (MEMS)
- LED-OLED productions
- Plasma chemistry
- Environmental and health applications (sterilization)
- Helyssen based thrusters (ABEP)
- Waste treatment
At the heart of all these applications lie a plasma source. There is a constant need to improve them mainly in two directions : higher process rates thanks to higher plasma densities and larger processing areas.
Larger processing areas have a double interest: it allows to treat more pieces in a single run or to develop new kinds of products