Delivery of a high pressure ICP plasma source for annealing application at Annealsys

Annealsys is a leading manufacturer of RTP and DLI -CVD / DLI -ALD systems for research production applications in the fields of silicon and compound semiconductors, nanotechnologies, MEMS, solar cells, glass

Annealsys manufactures Rapid Thermal Processing (RTP) and chemical vapor deposition (CVD/ALD) systems. Remote plasma sources are used to create the needed precursors for the desired applications. Helyssen’s high pressure ICP plasma source is used as remote plasma generator

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